Search Results - Fang, Yen-Hsang

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  1. 1
    Method for modulating the wafer bow of free-standing GaN substrates via inductively coupled plasma etching

    Method for modulating the wafer bow of free-standing GaN substrates via inductively coupled plasma etching by Chen, Kuei-Ming, Yeh, Yen-Hsien, Wu, Yin-Hao, Chiang, Chen-Hao, Yang, Din-Ru, Chao, Chu-Li, Chi, Tung-Wei, Fang, Yen-Hsang, Tsay, Jenq-Dar, Lee, Wei-I

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  2. 2
    Stress and Defect Distribution of Thick GaN Film Homoepitaxially Regrown on Free-Standing GaN by Hydride Vapor Phase Epitaxy

    Stress and Defect Distribution of Thick GaN Film Homoepitaxially Regrown on Free-Standing GaN by Hydride Vapor Phase Epitaxy by Chen, Kuei-Ming, Yeh, Yen-Hsien, Wu, Yin-Hao, Chiang, Chen-Hao, Yang, Din-Ru, Gao, Zhong-Shan, Chao, Chu-Li, Chi, Tung-Wei, Fang, Yen-Hsang, Tsay, Jenq-Dar, Lee, Wei-I

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