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Design of very transparent fluoropolymer resists for semiconductor manufacture at 157 nm
by
Feiring, A.E.
,
Crawford, M.K.
,
Farnham, W.B.
,
Feldman, J.
,
French, R.H.
,
Leffew, K.W.
,
Petrov, V.A.
,
Schadt, F.L.
,
Wheland, R.C.
,
Zumsteg, F.C.
Published in
Journal of fluorine chemistry
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Pentacoordinate cyanosiliconates
by
Dixon, David A
,
Hertler, Walter R
,
Chase, D. Bruce
,
Farnham, William B
,
Davidson, Fredric
Published in
Inorganic chemistry
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