Search Results - Farrens, Shari N.

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  1. 1
    Thin Wafer Handling Challenges and Emerging Solutions

    Thin Wafer Handling Challenges and Emerging Solutions by Farrens, Shari N., Bisson, Peter, Sood, Sumant, Hermanowski, James

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  2. 2
    Chemical free room temperature wafer to wafer direct bonding

    Chemical free room temperature wafer to wafer direct bonding by FARRENS, S. N, DEKKER, J. R, SMITH, J. K, ROBERDS, B. E

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  3. 3
    Low‐Temperature Wafer Bonding of Surfaces Using a Reactive Sputtered Oxide

    Low‐Temperature Wafer Bonding of Surfaces Using a Reactive Sputtered Oxide by Folta, James A., Hunt, Charles E., Farrens, Shari N.

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  4. 4
    Atmospheric Plasma Conditions Compatible with Wafer to Wafer Bonding Strategies

    Atmospheric Plasma Conditions Compatible with Wafer to Wafer Bonding Strategies by Farrens, Shari N., Gabriel, Markus

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  5. 5
    An atomic force microscopy study on the roughness of silicon wafers correlated with direct wafer bonding

    An atomic force microscopy study on the roughness of silicon wafers correlated with direct wafer bonding by ROBERDS, B. E, FARRENS, S. N

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  6. 6
    The effects of process-induced defects on the chemical selectivity of highly doped boron etch stops in silicon

    The effects of process-induced defects on the chemical selectivity of highly doped boron etch stops in silicon by DESMOND, C. A, HUNT, C. E, FARRENS, S. N

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