Search Results - Farys, Vincent

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  1. 1
    Impact of process factors on the performance of hole array metallic filters

    Impact of process factors on the performance of hole array metallic filters by Girard-Desprolet, Romain, Lhostis, Sandrine, Beylier, Charlotte, Farys, Vincent, Vitrant, Guy, Boutami, Salim

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  2. 2
    Highly sensitive detection technique of buried defects in extreme ultraviolet masks using at-wavelength scanning dark-field microscopy

    Highly sensitive detection technique of buried defects in extreme ultraviolet masks using at-wavelength scanning dark-field microscopy by Farys, V., Schiavone, P., Polack, F., Idir, M., Bertolo, M., Bianco, A., La Rosa, S., Cautero, G., Vannuffel, C., Quesnel, E., Muffato, V.

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  3. 3
    Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blanks

    Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blanks by Farys, Vincent, Charpin-Nicolle, Christelle, Richard, Marieke, Robic, Jean-Yves, Muffato, Viviane, Quesnel, Etienne, Postnikov, Sergeï, Schiavone, Patrick, Besacier, Maxime, Smaali, Rafik, Naulleau, Patrick

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  4. 4
    Measurement of residual thickness using scatterometry

    Measurement of residual thickness using scatterometry by Fuard, David, Perret, Corinne, Farys, Vincent, Gourgon, Cécile, Schiavone, Patrick

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  5. 5
    Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blanks

    Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blanks by Farys, Vincent, Charpin-Nicolle, Christelle, Richard, Marieke, Robic, Jean-Yves, Muffato, Viviane, Quesnel, Etienne, Postnikov, Sergeï, Schiavone, Patrick, Besacier, Maxime, Smaali, Rafik, Naulleau, Patrick

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