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Manufacturability of Highly Densed Arrays of SC 20% Doped ALN Monolithic PMUT
by
Marigo, Eloi
,
Azuan, Muhammad Nur
,
Amiera, Anis
,
Annie, Loh
,
Shazwani, Nor
,
Fei, Chan Buan
,
Soundara-Pandian, Mohanraj
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Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging
by
Ferrer, Eloi Marigo
,
Pandian, Mohanraj Soundara
,
Uranga, Arantxa
,
Barniol, Nuria
,
Tay, Wee Song
,
Fei, Chan Buan
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