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Multi-scale modeling of gas-phase reactions in metal-organic chemical vapor deposition growth of WSe2
by
Xuan, Yuan
,
Jain, Abhishek
,
Zafar, Suhaib
,
Lotfi, Roghayyeh
,
Nayir, Nadire
,
Wang, Yuanxi
,
Choudhury, Tanushree H.
,
Wright, Samuel
,
Feraca, John
,
Rosenbaum, Leonard
,
Redwing, Joan M.
,
Crespi, Vincent
,
van Duin, Adri C.T.
Published in
Journal of crystal growth
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Journal Of Crystal Growth
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Bedampfen
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Blindleistung
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Chemical Kinetics
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Chemical Reactions
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Chemical Vapor Deposition
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Chemische Kinetik
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Computational Fluid Dynamics
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Computer Simulation
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Correlation Analysis
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Crystal Growth
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Crystallography
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Density Functional Theory
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Dichtefunktionaltheorie
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Film Growth
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Film Thickness
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Gaskonzentration
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Gasreaktion
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