Search Results - Fettig, R.K.

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    Mechanical property characterization of LPCVD silicon nitride thin films at cryogenic temperatures

    Mechanical property characterization of LPCVD silicon nitride thin films at cryogenic temperatures by Wen-Hsien Chuang, Luger, T., Fettig, R.K., Ghodssi, R.

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    Fatigue study of nano-scale silicon nitride thin films using a novel electrostatic actuator

    Fatigue study of nano-scale silicon nitride thin films using a novel electrostatic actuator by Wen-Hsien Chuang, Fettig, R.K., Ghodssi, R.

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