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    Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films

    Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films by Karimi Aghda, Soheil, Holzapfel, Damian M., Music, Denis, Unutulmazsoy, Yeliz, Mráz, Stanislav, Bogdanovski, Dimitri, Fidanboy, Gönenç, Hans, Marcus, Primetzhofer, Daniel, Méndez, Alba San José, Anders, André, Schneider, Jochen M.

    Published in Acta materialia
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