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Evaluation of Next Generation Fluids for ArF Immersion Lithography Beyond Water
by
Tran, Hoang
,
French, Roger H.
,
Adelman, Douglas J.
,
Feldman, Jerald
,
Qiu, Weiming
,
Wheland, Robert C.
,
Brubaker, Luke W.
,
Fischel, Brian E.
,
Fones, Barbara B.
,
Lemon, Michael F.
,
Yang, Min K.
,
Nagao, Osami
,
Kaku, Mureo
,
Mocella, Michael
,
Schmieg, John J.
Published in
Journal of Photopolymer Science and Technology
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Amorphous fluoropolymers from tetrafluoroethylene and bulky vinyl esters or vinyl ethers
by
Feiring, Andrew E
,
Wonchoba, Edward R
,
Fischel, Brian E
,
Thieu, Tho V
,
Nassirpour, M.Reza
Published in
Journal of fluorine chemistry
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Journal Of Fluorine Chemistry
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Journal Of Photopolymer Science And Technology
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Absorbance
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Active Recycle
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