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Optical Thin Film Formation with O 2 Cluster Ion Assisted Deposition
by
Shirai, Ken-ichi
,
Fujiwara, Yu-ji
,
Takahashi, Rie
,
Toyoda, Noriaki
,
Matsui, Shinji
,
Mitamura, Tohru
,
Terasawa, Mititaka
,
Yamada, Isao
Published in
Japanese Journal of Applied Physics
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Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
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Physical Sciences
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Physics
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Physics, Applied
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Institute Of Physics Iopscience Extra
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