Search Results - GEKA, Hayato

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  1. 1
    Filling of Deep-sub-µm Through Holes and Trenches by High Vacuum Planar Magnetron Sputter

    Filling of Deep-sub-µm Through Holes and Trenches by High Vacuum Planar Magnetron Sputter by ASAMAKI, Tatsuo, KATO, Takao, SAITO, Shigeru, KASUKAWA, Toshio, GEKA, Hayato, MOTOHASHI, Kenichi

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  2. 2
    高真空スパッタによる微細孔の埋込

    高真空スパッタによる微細孔の埋込 by 麻蒔, 立男, 加藤, 隆男, 斉藤, 茂, 粕川, 敏夫, 外賀, 早矢土, 本橋, 研一

    Published in Electrochemistry
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