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Depth profile measurement of activated boron-concentration in diamond thin films utilizing Schottky diode C-V curves
by
KOBAYASHI, T
,
GEN RIANG HOU
,
MAKI, T
,
SHIKAMA, S
Published in
Japanese Journal of Applied Physics
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Journal Title
Japanese Journal Of Applied Physics
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Subjects
Boron
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Capacitance
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Condensed Matter: Electronic Structure, Electrical, Magnetic, And Optical Properties
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Defects And Impurities: Doping, Implantation, Distribution, Concentration, Etc
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Diamond Film
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Exact Sciences And Technology
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General Engineering
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General Physics And Astronomy
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Impurity And Defect Levels; Energy States Of Adsorbed Species
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Junction
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Lattice Dynamics
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Phonon-Electron And Phonon-Phonon Interactions
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Phonons And Vibrations In Crystal Lattices
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Physics
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Schottky Barrier
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Surface And Interface Electron States
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Surface Double Layers, Schottky Barriers, And Work Functions
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Surfaces And Interfaces; Thin Films And Whiskers
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Thin Film Structure And Morphology
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Institute Of Physics
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