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    Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns

    Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns by Sinha, Jyoti, Gallis, Leonidas, Clerix, Jan-Willem J., van der Veen, Marleen, Innocent, Jerome, Illiberi, Andrea, Givens, Michael, Nyns, Laura, Delabie, Annelies

    Published in Chemistry of materials
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    Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge 2 Sb 2 Te 5 and Its Mechanism in Nanopatterns

    Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge 2 Sb 2 Te 5 and Its Mechanism in Nanopatterns by Sinha, Jyoti, Gallis, Leonidas, Clerix, Jan-Willem J., van der Veen, Marleen, Innocent, Jerome, Illiberi, Andrea, Givens, Michael, Nyns, Laura, Delabie, Annelies

    Published in Chemistry of materials
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