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Search Results - Gardopee, G.J.
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Plasma thinning of silicon-on-insulator bonded wafers
by
Gardopee, G.J.
,
Mumola, P.B.
,
Clapis, P.J.
,
Zarowin, C.B.
,
Bollinger, L.D.
,
Ledger, A.M.
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Microelectronic engineering
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Plasma thinned SOI bonded wafers
by
Mumola, P.B.
,
Gardopee, G.J.
,
Clapis, P.J.
,
Zarowin, C.B.
,
Bollinger, L.D.
,
Ledger, A.M.
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Surface quality of plasma-thinned bonded SOI wafers
by
Feng, T.
,
Matloubian, M.
,
Gardopee, G.J.
,
Mathur, D.P.
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Plasma process integration for larger wafer manufacturing
by
Bollinger, L.D.
,
Gardopee, G.J.
,
Mathur, D.P.
,
Mumola, P.B.
,
Nester, J.F.
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Material properties of plasma-thinned bonded SOI wafers
by
Feng, T.
,
Matloubian, M.
,
Mathur, D.P.
,
Mumola, P.B.
,
Gardopee, G.J.
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Microelectronic Engineering
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Plasma Applications
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Wafer Bonding
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