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A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al 0.72 Sc 0.28 N Lamb Wave Resonators and Filters
by
Tang, Zichen
,
Esteves, Giovanni
,
Yen, Sean
,
Young, Travis R.
,
David Henry, Michael
,
Gastian, Loren
,
Nordquist, Christopher
,
Olsson, Roy H.
Published in
Journal of microelectromechanical systems
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A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al0.72Sc0.28N Lamb Wave Resonators and Filters
by
Tang, Zichen
,
Esteves, Giovanni
,
Yen, Sean
,
Young, Travis R.
,
David Henry, Michael
,
Gastian, Loren
,
Nordquist, Christopher
,
Olsson, Roy H.
Published in
Journal of microelectromechanical systems
Get full text
Article
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Journal Of Microelectromechanical Systems
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Subjects
Aluminum Compounds
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Aluminum Scandium Nitride
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Electromechanical Coupling Coefficient
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Engineering
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Engineering, Electrical & Electronic
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Filters
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Instruments & Instrumentation
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Lamb Wave Resonator
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Monolithic Integrated Circuits
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Nanoscience & Nanotechnology
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Physical Sciences
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Physics
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Physics, Applied
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Piezoelectric Transducers
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Resonators
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Science & Technology
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Science & Technology - Other Topics
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Spurious Mode Suppression
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Surface Acoustic Waves
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Technology
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