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RF plasma generation in the chamber with the conducting walls
by
Gavrikov, Andey
,
Kuzmichev, Sergey
,
Lizyakin, Gennadiy
,
Smirnov, Valentin
,
Timirkhanov, Rinat
,
Usmanov, Ravil
,
Vorona, Nazar
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Gas Pressure
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Radio Frequency Discharge
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