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Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering
by
Gelali, Ali
,
Ahmadpourian, Azin
,
Bavadi, Reza
,
Hantehzadeh, M. R.
,
Ahmadpourian, Arman
Published in
Journal of fusion energy
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Comment on: [Comment on: “Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering” [J Fusion Energ DOI 10.1007/s10894-012-9534...
by
Gelali, Ali
,
Shafiekhani, A
,
Ghorbani, A
,
Ahmadpourian, Azin
Published in
Journal of fusion energy
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Comment on: [Comment on: “Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering” [J Fusion Energ DOI 10.1007/s10894-012-9534...
by
Gelali, Ali
,
Shafiekhani, A.
,
Ghorbani, A.
,
Ahmadpourian, Azin
Published in
Journal of fusion energy
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Article
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Comment on: [Comment on: "Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering" [J Fusion Energ DOI 10.1007/s10894-012-9534...
by
Gelali, Ali
,
Shafiekhani, A
,
Ghorbani, A
,
Ahmadpourian, Azin
Published in
Journal of fusion energy
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Article
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Comment on: [Comment on: “Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering” [J Fusion Energ DOI 10.1007/s10894-012-9534...
by
Gelali, Ali
,
Shafiekhani, A.
,
Ghorbani, A.
,
Ahmadpourian, Azin
Published in
Journal of fusion energy
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Article
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Journal Of Fusion Energy
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Subjects
Plasma Physics
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Thin Films
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Dielectric Films
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Energy Systems
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Magnetron Sputtering
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Nitrides
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Nuclear Energy
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Nuclear Fusion
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Physics
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Physics And Astronomy
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Sustainable Development
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Titanium Nitride
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Afm
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Algorithms
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Applied Sciences
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Atomic Force Microscopy
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Controled Nuclear Fusion Plants
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Crystallites
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