Search Results - Gioveni, Salvatore

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    Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

    Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications by Berdova, Maria, Wiemer, Claudia, Lamperti, Alessio, Tallarida, Grazia, Cianci, Elena, Lamagna, Luca, Losa, Stefano, Rossini, Silvia, Somaschini, Roberto, Gioveni, Salvatore, Fanciulli, Marco, Franssila, Sami

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