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A novel test structure to study intrinsic reliability of barrier/low-k
by
Zhao, L.
,
Tokei, Z.
,
Gischia, G.G.
,
Pantouvaki, M.
,
Croes, K.
,
Beyer, G.
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A new perspective of barrier material evaluation and process optimization
by
Zhao, L.
,
Tikei, Z.
,
Gischia, G.G.
,
Volders, H.
,
Beyer, G.
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Barrier
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Capacitance-Voltage Characteristics
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