Search Results - Goasduff, Yoann

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    Surface treatment against bromine defectivity in plasma etch reactor

    Surface treatment against bromine defectivity in plasma etch reactor by Yoann, Goasduff, Nguyen, Marylaine, Patrice, Laurens, Distefano, Giuseppe

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    Comparison study between optical emission spectroscopy and x-ray photoelectron spectroscopy techniques during process etch plasma

    Comparison study between optical emission spectroscopy and x-ray photoelectron spectroscopy techniques during process etch plasma by Rizquez, Maria, Roussy, Agnès, James, Anthony, Pinaton, Jacques, Goasduff, Yoann

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