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Effect of flow rate on reactive ion etching of GaAs in CH 4/H 2 plasma
by
Sahafi, HF
,
Goldspink, GF
,
Webb, AP
,
Carter, MA
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Vacuum
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Effect of flow rate on reactive ion etching of GaAs in CH4/H2 plasma
by
SAHAFI, H. F
,
GOLDSPINK, G. F
,
WEBB, A. P
,
CARTER, M. A
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Vacuum
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Reactive and chemically assisted ion beam etching of Si and SiO2
by
CARTER, M. A
,
GOLDSPINK, G. F
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Vacuum
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Reactive and chemically assisted ion beam etching of Si and SiO 2
by
Carter, MA
,
Goldspink, GF
Published in
Vacuum
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A review of reactive ion beam etching for production
by
Revell, P.J.
,
Goldspink, G.F.
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Vacuum
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Vacuum
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Materials Science
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Ion Radiation Effects
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Physical Radiation Effects, Radiation Damage
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Solid Surfaces And Solid-Solid Interfaces
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Structure Of Solids And Liquids; Crystallography
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Backfile Package - Physics General (Legacy) [Ypa]
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Science Citation Index Expanded (Web Of Science)
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