Electrical characterization of ECR enhaced deposited silicon nitride bilayers for high quality Al/SiNx/InP MIS structure fabrication by Duen~as, S, Pela´ez, R, Casta´n, E, Pinacho, R, Quintanilla, L, Barbolla, J, Ma´rtil, I, Redondo, E, Gonza´lez-di´az, G

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