Search Results - Graetsch, Falk

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  1. 1
    Comparison of MOCVD- and ALD-Deposited HfZrO4 Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies

    Comparison of MOCVD- and ALD-Deposited HfZrO4 Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies by KELWING, Torben, NAUMANN, Andreas, HANSCH, Walter, TRENTZSCH, Martin, TRUI, Bernhard, HERRMANN, Lutz, MUTAS, Sergej, GRAETSCH, Falk, CARTER, Rick, STEPHAN, Rolf, KÜCHER, Peter

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  2. 2
    Comparison of MOCVD- and ALD-Deposited [Formula Omitted] Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies

    Comparison of MOCVD- and ALD-Deposited [Formula Omitted] Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies by Kelwing, Torben, Naumann, Andreas, Trentzsch, Martin, Trui, Bernhard, Herrmann, Lutz, Mutas, Sergej, Graetsch, Falk, Carter, Rick, Stephan, Rolf, Kucher, Peter, Hansch, Walter

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  3. 3
    Comparison of MOCVD- and ALD-Deposited \hbox Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies

    Comparison of MOCVD- and ALD-Deposited \hbox Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies by Kelwing, Torben, Naumann, Andreas, Trentzsch, Martin, Trui, Bernhard, Herrmann, Lutz, Mutas, Sergej, Graetsch, Falk, Carter, Rick, Stephan, Rolf, Kücher, Peter, Hansch, Walter

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  4. 4
    Comparison of MOCVD- and ALD-Deposited hbox HfZrO 4 Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies

    Comparison of MOCVD- and ALD-Deposited hbox HfZrO 4 Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies by Kelwing, Torben, Naumann, Andreas, Trentzsch, Martin, Trui, Bernhard, Herrmann, Lutz, Mutas, Sergej, Graetsch, Falk, Carter, Rick, Stephan, Rolf, Kucher, Peter, Hansch, Walter

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  5. 5
    Physical and Electrical Properties of MOCVD and ALD Deposited HfZrO 4 Gate Dielectrics for 32nm CMOS High Performance Logic SOI Technologies

    Physical and Electrical Properties of MOCVD and ALD Deposited HfZrO 4 Gate Dielectrics for 32nm CMOS High Performance Logic SOI Technologies by Kelwing, Torben, Mutas, Sergej, Trentzsch, Martin, Naumann, Andreas, Trui, Bernhard, Herrmann, Lutz, Graetsch, Falk, Klein, Christoph, Wilde, Lutz, Ohsiek, Susanne, Weisheit, Martin, Peeva, Anita, Richter, Inka, Prinz, Hartmut, Wuerfel, Alexander, Carter, Rick, Stephan, Rolf, Kücher, Peter, Hansch, Walter

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  6. 6
    Ultrathin plasma nitrided oxide gate dielectrics for sub-100 nm generation CMOS technology

    Ultrathin plasma nitrided oxide gate dielectrics for sub-100 nm generation CMOS technology by JEON, Joong, YEH, Ping, OGLE, Bob, EN, Bill, WIECZOREK, Karsten, GRAETSCH, Falk, BERNARD, Joffre, KIM, Hyeon S, IBOK, Effiong, OLSEN, Chris, ZHAO, Richard

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