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Search Results - Greek, Staffan
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Deflection of surface-micromachined devices due to internal, homogeneous or gradient stresses
by
Greek, Staffan
,
Chitica, Nicolae
Published in
Sensors and actuators. A. Physical.
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Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures
by
Greek, Staffan
,
Ericson, Fredric
,
Johansson, Stefan
,
Fürtsch, Matthias
,
Rump, Arnold
Published in
Journal of micromechanics and microengineering
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In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures
by
Greek, Staffan
,
Ericson, Fredric
,
Johansson, Stefan
,
Schweitz, Jan-Åke
Published in
Thin solid films
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Weibull fracture probability for silicon wafer bond evaluation
by
KÖHLER, J
,
JONSSON, K
,
GREEK, S
,
STENMARK, L
Published in
Journal of the Electrochemical Society
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High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation
by
Ericson, Fredric
,
Greek, Staffan
,
Söderkvist, Jan
,
Schweitz, Jan-Åke
Published in
Journal of micromechanics and microengineering
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Mechanical considerations in the design of a micromechanical tuneable InP-based WDM filter
by
Greek, S.
,
Gupta, R.
,
Hjort, K.
Published in
Journal of microelectromechanical systems
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The strength of surface micromachined indium phosphide devices evaluated by Weibull analysis of tensile and bending tests
by
GREEK, S
,
SEASSAL, C
,
VIKTOROVITCH, P
,
HJORT, K
Published in
Sensors and materials
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Fabrication of tunable InP/air-gap Fabry-Perot cavities by selective etching of InGaAs sacrificial layers
by
Chitica, Nicolae
,
Daleiden, Jürgen
,
Bentell, Jonas
,
André, Janos
,
Strassner, Martin
,
Greek, Staffan
,
Pasquariello, Donato
,
Karlsson, Mikael
,
Gupta, Ram
,
Hjort, Klas
Published in
Physica scripta
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