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Charge dissipation layer optimisation for nano-scale electron-beam lithography pattern definition onto diamond
by
Greer, A.I.M.
,
Moran, D.A.J.
Published in
Diamond and related materials
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Diamond And Related Materials
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Subjects
Aluminium
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Applied Sciences
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Charge
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Cross-Disciplinary Physics: Materials Science; Rheology
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Deposition
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Design. Technologies. Operation Analysis. Testing
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Diamond
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Discharge
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Dissipation
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Electron Beam Lithography
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Electron-Beam Lithography
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Electronics
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Exact Sciences And Technology
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Fullerenes And Related Materials; Diamonds, Graphite
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Integrated Circuits
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Masks
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Materials Science
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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Methods Of Nanofabrication
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Sciencedirect
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Sciencedirect Freedom Collection
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Science Citation Index Expanded (Web Of Science)
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Backfile Package - Materials Science [Yms]
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