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Stability of thin platinum films implemented in high-temperature microdevices
by
Tiggelaar, R.M.
,
Sanders, R.G.P.
,
Groenland, A.W.
,
Gardeniers, J.G.E.
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Sensors and actuators. A. Physical.
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Characterisation and passivation of interface defects in (100 ) -Si /SiO2 /HfO2 /TiN gate stacks
by
HURLEY, P. K
,
CHERKAOUI, K
,
MCDONNELL, S
,
HUGHES, G
,
GROENLAND, A. W
Published in
Microelectronics and reliability
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Characterisation and passivation of interface defects in (1 0 0)-Si/SiO 2/HfO 2/TiN gate stacks
by
Hurley, P.K.
,
Cherkaoui, K.
,
McDonnell, S.
,
Hughes, G.
,
Groenland, A.W.
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Microelectronics and reliability
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Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films
by
Groenland, A.W.
,
Wolters, R.A.M.
,
Kovalgin, A.Y.
,
Schmitz, J.
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