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Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT)
by
Boettcher, T
,
Gronle, M
,
Osten, W
Published in
Optics express
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Single-shot low coherence pointwise measuring interferometer with potential for in-line inspection
by
Hahn, R
,
Krauter, J
,
Körner, K
,
Gronle, M
,
Osten, W
Published in
Measurement science & technology
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Advantages of chromatic-confocal spectral interferometry in comparison to chromatic confocal microscopy
by
Lyda, W
,
Gronle, M
,
Fleischle, D
,
Mauch, F
,
Osten, W
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Measurement science & technology
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Sliding mode tracking control of an electrostatic parallel-plate MEMS
by
Gronle, M
,
Guchuan Zhu
,
Saydy, L
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Conference Proceeding
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