Search Results - Gutsch, Manuela

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  1. 1
    Evaluation of direct patternable inorganic spin-on hard mask materials using electron beam lithography

    Evaluation of direct patternable inorganic spin-on hard mask materials using electron beam lithography by Thrun, Xaver, Choi, Kang-Hoon, Freitag, Martin, Grenville, Andrew, Gutsch, Manuela, Hohle, Christoph, Stowers, Jason K., Bartha, Johann W.

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  2. 2
    15days electron beam exposure for manufacturing of large area silicon based NIL master

    15days electron beam exposure for manufacturing of large area silicon based NIL master by Thrun, Xaver, Choi, Kang-Hoon, Freitag, Martin, Gutsch, Manuela, Hohle, Christoph, Paul, Jan, Rudolph, Matthias, Steidel, Katja

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    15 days electron beam exposure for manufacturing of large area silicon based NIL master

    15 days electron beam exposure for manufacturing of large area silicon based NIL master by Thrun, X, Choi, K-H, Freitag, M, Gutsch, M, Hohle, C, Paul, J, Rudolph, M, Steidel, K

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  4. 4
    Variable-shaped e-beam lithography enabling process development for future copper damascene technology

    Variable-shaped e-beam lithography enabling process development for future copper damascene technology by Jaschinsky, Philipp, Erben, Jens-Wolfram, Choi, Kang-Hoon, Schulze, Knut, Gutsch, Manuela, Blaschta, Frieder, Freitag, Martin, Schulz, Stefan E., Steidel, Katja, Hohle, Christoph, Gessner, Thomas, Kuecher, Peter

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  5. 5
    15 days electron beam exposure for manufacturing of large area silicon based NIL master : Nanolithography 2012

    15 days electron beam exposure for manufacturing of large area silicon based NIL master : Nanolithography 2012 by THRUN, Xaver, CHOI, Kang-Hoon, FREITAG, Martin, GUTSCH, Manuela, HOHLE, Christoph, PAUL, Jan, RUDOLPH, Matthias, STEIDEL, Katja

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  6. 6
    High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures

    High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures by Weinreich, Wenke, Rudolph, Matthias, Koch, Johannes, Paul, Jan, Seidel, Konrad, Riedel, Stefan, Sundqvist, Jonas, Steidel, Katja, Gutsch, Manuela, Beyer, Volkhard, Hohle, Christoph

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