Poly-Si gate CMOS with hafnium silicate gate dielectric by HOBBS, Christopher, GRANT, John, FRANKE, Andrea, GARCIA, Ricardo, HEBERT, Liz, AZRAK, Marijean, SING, David, STEPHENS, Tab, SCROGUM, Carl, RAI, Raghaw, BECNEL, Virginia, CONNER, Jim, KHER, Shreyas, WHITE, Bruce, TOBIN, Phil, DHANDAPANI, Veer, TAYLOR, Bill, DIP, Lurae, HEGDE, Rama, METZNER, Craig, HSING TSENG, GILMER, David

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