Search Results - Hachiya, Takayo

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    Impact of Residual Impurities on Annealing Properties of Vacancies in Electroplated Cu Studied Using Monoenergetic Positron Beams

    Impact of Residual Impurities on Annealing Properties of Vacancies in Electroplated Cu Studied Using Monoenergetic Positron Beams by Uedono, Akira, Mori, Kazuteru, Ito, Kenichi, Imamizu, Kentarou, Hachiya, Takayo, Kamijo, Hiroyuki, Hasunuma, Masahiko, Kaneko, Hisashi, Toyoda, Hiroshi, Ohdaira, Toshiyuki, Suzuki, Ryouichi

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    Pattern Transfer Process Using Spun-on Carbon Film for KrF and ArF Lithography

    Pattern Transfer Process Using Spun-on Carbon Film for KrF and ArF Lithography by Sato, Yasuhiko, Shiobara, Eishi, Matsunaga, Kentaro, Shibata, Tsuyoshi, Abe, Junko, Hayashi, Hisataka, Ohiwa, Tokuhisa, Kasai, Mayumi, Hachiya, Takayo, Onishi, Yasunobu

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