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Imaging patterns of intensity in topographically directed photolithography
by
Paul, Kateri E.
,
Breen, Tricia L.
,
Hadzik, Tanja
,
Whitesides, George M.
,
Smith, Stephen P.
,
Prentiss, Mara
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
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Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures
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Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
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Journal Of Vacuum Science & Technology. B, Microelectronics Processing And Phenomena
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Engineering
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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