Search Results - Halty, Sebastien

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  1. 1
    Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing

    Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing by Tabata, Toshiyuki, Roze, Fabien, Acosta Alba, Pablo, Halty, Sebastien, Raynal, Pierre-Edouard, Karmous, Imen, Kerdiles, Sebastien, Mazzamuto, Fulvio

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  2. 2
    Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices

    Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices by Tabata, Toshiyuki, Rozé, Fabien, Thuries, Louis, Halty, Sébastien, Raynal, Pierre-Edouard, Karmous, Imen, Huet, Karim

    Published in Electronics (Basel)
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  3. 3
    Non-doped HfO 2 crystallization controlled by dwell time in laser annealing

    Non-doped HfO 2 crystallization controlled by dwell time in laser annealing by Tabata, Toshiyuki, Halty, Sebastien, Rozé, Fabien, Huet, Karim, Mazzamuto, Fulvio

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  4. 4
    Non-doped HfO2 crystallization controlled by dwell time in laser annealing

    Non-doped HfO2 crystallization controlled by dwell time in laser annealing by Tabata, Toshiyuki, Halty, Sebastien, Rozé, Fabien, Huet, Karim, Mazzamuto, Fulvio

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  5. 5
    Microsecond non-melt UV laser annealing for future 3D-stacked CMOS

    Microsecond non-melt UV laser annealing for future 3D-stacked CMOS by Tabata, Toshiyuki, Rozé, Fabien, Thuries, Louis, Halty, Sebastien, Raynal, Pierre-Edouard, Huet, Karim, Mazzamuto, Fulvio, Joshi, Abhijeet, Basol, Bulent M., Alba, Pablo Acosta, Kerdilès, Sébastien

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  6. 6
    (Invited) Laser Thermal Annealing for Low Thermal Budget Applications: From Contact Formation to Material Modification

    (Invited) Laser Thermal Annealing for Low Thermal Budget Applications: From Contact Formation to Material Modification by Huet, Karim, Tabata, Toshiyuki, Aubin, Joris, Rozé, Fabien, Thuries, Louis, Halty, Sebastien, Curvers, Benoit, Mazzamuto, Fulvio, Liu, J., Mori, Yoshihiro

    Published in ECS transactions
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  7. 7
    Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects

    Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects by Nogami, Takeshi, Gluschenkov, Oleg, Sulehria, Yasir, Nguyen, Son, Peethala, Brown, Huang, Huai, Shobha, Hosadurga, Lanzillo, Nick, Patlolla, Raghuveer, Sil, Devika, Simon, Andrew, Edelstein, Daniel, Felix, Nelson, Liu, Junjun, Tabata, Toshiyuki, Mazzamuto, Fulvio, Halty, Sebastien, Roze, Fabien, Okuno, Yasutoshi, Uedono, Akira

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  8. 8
    Copper Large-Scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

    Copper Large-Scale Grain Growth by UV Nanosecond Pulsed Laser Annealing by Tabata, Toshiyuki, Raynal, Pierre-Edouard, Roze, Fabien, Halty, Sebastien, Thuries, Louis, Cristiano, Fuccio, Scheid, Emmanuel, Mazzamuto, Fulvio

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  9. 9
    Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing

    Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing by Tabata, Toshiyuki, Rozé, Fabien, Pablo Acosta Alba, Halty, Sebastien, Pierre-Edouard Raynal, Karmous, Imen, Kerdilés, Sébastien, Mazzamuto, Fulvio

    Published in arXiv.org
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  10. 10
    Microsecond non-melt UV laser annealing for future 3D-stacked CMOS

    Microsecond non-melt UV laser annealing for future 3D-stacked CMOS by Tabata, Toshiyuki, Rozé, Fabien, Thuries, Louis, Halty, Sebastien, Pierre-Edouard Raynal, Huet, Karim, Mazzamuto, Fulvio, Joshi, Abhijeet, Basol, Bulent M, Pablo Acosta Alba, Kerdilès, Sébastien

    Published in arXiv.org
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  11. 11
    Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices

    Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices by Tabata, Toshiyuki, Rozé, Fabien, Thuries, Louis, Halty, Sébastien, Pierre-Edouard Raynal, Karmous, Imen, Huet, Karim

    Published in arXiv.org
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  12. 12
    Copper Large-scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

    Copper Large-scale Grain Growth by UV Nanosecond Pulsed Laser Annealing by Tabata, Toshiyuki, Pierre-Edouard Raynal, Rozé, Fabien, Halty, Sébastien, Thuries, Louis, Fuccio Cristiano, Scheid, Emmanuel, Mazzamuto, Fulvio

    Published in arXiv.org
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  13. 13
    Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing

    Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing by Tabata, Toshiyuki, Rozé, Fabien, Pablo Acosta Alba, Halty, Sébastien, Pierre-Edouard Raynal, Karmous, Imen, Kerdilès, Sébastien, Mazzamuto, Fulvio

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