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Size Effects of Poly-Si Formed by Laser Annealing With Periodic Intensity Distribution on the TFT Characteristics
by
Mizutani, Akira
,
Hamano, Fuminobu
,
Nakamura, Daisuke
,
Goto, Tetsuya
,
Aid, Siti Rahmah
,
Ikenoue, Hiroshi
Published in
IEEE journal of the Electron Devices Society
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Ieee Journal Of The Electron Devices Society
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Annealing
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Excimer Laser Annealing
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Lasers
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Low Temperature Polycrystalline Si
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