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High throughput parallel micro and nano-scale replication - a low cost alternative for the fabrication of electronic-, optic- and microfluidic devices
by
Kreindl, G.
,
Miller, R.
,
Thanner, C.
,
Schachinger, M.
,
Hangweier, P.
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Triple-stack anodic bonding for MEMS applications
by
DRAGOI, V
,
GLINSNER, T
,
HANGWEIER, P
,
LINDNER, P
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