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Effect of oxidation temperature on the inhomogeneity of chemical composition and density in nanometric SiO2 films grown on 4H-SiC
by
Kamiński, Paweł
,
Budzich, Rafał
,
Gaca, Jarosław
,
Michałowski, Paweł Piotr
,
Kozłowski, Roman
,
Harmasz, Anna
,
Ciuk, Tymoteusz
,
Płocharski, Janusz
Published in
Journal of materials chemistry. C, Materials for optical and electronic devices
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Effect of oxidation temperature on the inhomogeneity of chemical composition and density in nanometric SiO 2 films grown on 4H-SiC
by
Kamiński, Paweł
,
Budzich, Rafał
,
Gaca, Jarosław
,
Michałowski, Paweł Piotr
,
Kozłowski, Roman
,
Harmasz, Anna
,
Ciuk, Tymoteusz
,
Płocharski, Janusz
Published in
Journal of materials chemistry. C, Materials for optical and electronic devices
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Effect of oxidation temperature on the inhomogeneity of chemical composition and density in nanometric SiO films grown on 4H-SiC
by
Kami ski, Pawe
,
Budzich, Rafa
,
Gaca, Jaros aw
,
Micha owski, Pawe Piotr
,
Koz owski, Roman
,
Harmasz, Anna
,
Ciuk, Tymoteusz
,
P ocharski, Janusz
Published in
Journal of materials chemistry. C, Materials for optical and electronic devices
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Journal Title
Journal Of Materials Chemistry. C, Materials For Optical And Electronic Devices
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Journal Of Materials Chemistry C
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Subjects
Atomic Force Microscopy
1 results
1
Atomic Properties
1 results
1
Atomkraftmikroskopie
1 results
1
Chemical Composition
1 results
1
Chemische Zusammensetzung
1 results
1
Density
1 results
1
Herbivores
1 results
1
Inhomogeneity
1 results
1
Inhomogenität
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1
Materials Science
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1
Materials Science, Multidisciplinary
1 results
1
Oxidation
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1
Oxide Coatings
1 results
1
Oxidschicht
1 results
1
Physical Sciences
1 results
1
Physics
1 results
1
Physics, Applied
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Porosity
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Rückstrahlvermögen
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Sauerstoff
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Year of Publication
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Royal Society Of Chemistry
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