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A Self-Aligned Sacrificial Emitter Process for High Performance SiGe HBT in BiCMOS
by
Liu, Q.Z.
,
Adkisson, James
,
Benoit, John
,
Camillo-Castillo, Renata
,
Chan, Kevin
,
Cheng, Peng
,
Ellis-Monaghan, John
,
Gabert, Tom
,
Gambino, Jeff
,
Gray, Peter
,
Hasselbach, Joe
,
Jain, Vibhor
,
Khater, Marwan
,
Leidy, Bob
,
Park, Dae-Gyu
,
Pekarik, Jack
,
Tiersch, Matt
,
Willets, Christa
,
Zetterlund, Bjorn K.
,
Harame, D. L.
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Conference Proceeding
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Thermal processing: Shrinking devices on larger wafers
by
Hasselbach, Joe
,
Maity, Nimalya
,
Robles, Stuardo
Published in
Semiconductor international
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Semiconductor International
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Chemical Vapor Deposition
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Furnaces
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Abi/Inform Global
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Iopscience Extra
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Nexis Uk
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