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    Crystal orientation control of a-plane AlN films on r-plane sapphire fabricated by sputtering and high-temperature annealing

    Crystal orientation control of a-plane AlN films on r-plane sapphire fabricated by sputtering and high-temperature annealing by Ogawa, Yuki, Akaike, Ryota, Hayama, Jiei, Uesugi, Kenjiro, Shojiki, Kanako, Akiyama, Toru, Nakamura, Takao, Miyake, Hideto

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