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Construction of surfaces of general type from elliptic surfaces via Q-Gorenstein smoothing
by
JongHae Keum
,
Lee, Yongnam
,
Park, Heesang
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arXiv.org
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Resist profile characteristics caused by photoelectron and Auger electron blur at the resist–tungsten substrate interface in 100 nm proximity x-ray lithography
by
Seo, Younghun
,
Lee, Changhwan
,
Seo, Yongduk
,
Kim, Ohyun
,
Noh, Hyunpil
,
Kim, Heesang
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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