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Photoluminescence comparison of SRO-LPCVD films deposited on quartz, polysilicon and silicon substrates
by
Martínez-Hernández, H.P.
,
Luna López, J.A.
,
Aceves Mijares, M.
,
Monfil Leyva, K.
,
García Salgado, G.
,
Hernández-de-la-Luz, J.A.D.
,
Luna Flores, A.
,
Morales-Caporal, R.
,
Ramírez Amador, R.
,
Hernández Simón, Z.J.
Published in
Journal of luminescence
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Journal Of Luminescence
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Lpcvd
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Optics
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Photoluminescence
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Physical Sciences
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Polysilicon
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Science & Technology
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Si-Ncs
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Silicon Rich Oxide
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Sro Films
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Sciencedirect
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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