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Prediction of silicon dry etching using a piecewise linear algorithm
by
Jimenez-Fernandez, V.M.
,
Reyes-Betanzo, C.
,
Angelica-Cerdan, M.
,
Hernandez-Paxtian, Z.J.
,
Vazquez-Leal, H.
,
Itzmoyotl-Toxqui, A.
Published in
Journal of the Chinese Institute of Engineers
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Journal Of The Chinese Institute Of Engineers
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Journal Of The Chinese Institute Of Engineers, Transactions Of The Chinese Institute Of Engineers,Series A
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Algorithm
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Engineering
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Engineering, Multidisciplinary
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Piecewise Linear
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Science & Technology
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Silicon Etching
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Technology
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