Search Results - Hirukawa, Shigeru

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  1. 1
    Theoretical analysis of focus wedge mark for best-focus determination in photolithography

    Theoretical analysis of focus wedge mark for best-focus determination in photolithography by Suwa, Kyoichi, Yashiki, Satoshi, Hirukawa, Shigeru

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  2. 2
    Theoretical analysis of coma aberration measurement for aerial image sidelobe peaks

    Theoretical analysis of coma aberration measurement for aerial image sidelobe peaks by Suwa, Kyoichi, Yashiki, Satoshi, Hirukawa, Shigeru, Noda, Tomoya

    Published in Applied optics (2004)
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  3. 3
    Evaluation of incoherent-type pupil filter : spatial filter for incoherent stream

    Evaluation of incoherent-type pupil filter : spatial filter for incoherent stream by HIRUKAWA, S, SHIRAISHI, N, TAKEUCHI, Y, MATSUMOTO, K

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  4. 4
    Time-resolved resonance Raman spectra of transient species of photochromic 2-(2′,4′-dinitrobenzyl) pyridine

    Time-resolved resonance Raman spectra of transient species of photochromic 2-(2′,4′-dinitrobenzyl) pyridine by Takahashi, Hiroaki, Hirukawa, Shigeru, Suzuki, Shinichi, Torii, Yoshimi, Isaka, Hiroaki

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  5. 5
    Performance of Polarized Illuminators in Hyper NA Lithography Tools

    Performance of Polarized Illuminators in Hyper NA Lithography Tools by Matsuyama, T., Nishinaga, H., Tokuda, N., Hirukawa, S., Tanitsu, O., Owa, S.

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  6. 6
    Study of photochemical reaction of 2,4,2',4'-tetranitrodiphenylmethane by time-resolved resonance raman spectroscopy

    Study of photochemical reaction of 2,4,2',4'-tetranitrodiphenylmethane by time-resolved resonance raman spectroscopy by Suzuki, Shinichi, Hirukawa, Shigeru, Matsubara, Shinya, Takahashi, Hiroaki

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  7. 7
    Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and deposited film structure

    Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and deposited film structure by Nakano, Takeo, Hirukawa, Norihiko, Saeki, Shuhei, Baba, Shigeru

    Published in Vacuum
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