Search Results - Hochbauer, T F

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    Formation of hydrogen complexes in proton implanted silicon and their influence on the crystal damage

    Formation of hydrogen complexes in proton implanted silicon and their influence on the crystal damage by Hochbauer, T F, Misra, A, Shao, L, Nastasi, Michael Anthony, Mayer, J W, Ensinger, W

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    Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator

    Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator by Di, Zengfeng, Huang, Anping, Fu, Ricky K. Y., Chu, Paul K., Shao, Lin, Höchbauer, T., Nastasi, M., Zhang, Miao, Liu, Weili, Shen, Qinwo, Luo, Suhua, Song, Zhitang, Lin, Chenglu

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