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Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis
by
Henning, A.K.
,
Hochwitz, T.
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
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DRAM failure analysis with the force-based scanning Kelvin probe
by
Hochwitz, T.
,
Henning, A.K.
,
Daghlian, C.
,
Bolam, R.
,
Coutu, P.
,
Gluck, R.
,
Slinkman, J.
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Conference Proceeding
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Two-dimensional surface dopant profiling in silicon using scanning Kelvin probe microscopy
by
Henning, Albert K.
,
Hochwitz, Todd
,
Slinkman, James
,
Never, James
,
Hoffmann, Steven
,
Kaszuba, Phil
,
Daghlian, Charles
Published in
Journal of applied physics
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Journal Of Applied Physics
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Materials Science & Engineering. B, Solid-State Materials For Advanced Technology
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Materials Science And Engineering. B, Solid-State Materials For Advanced Technology/Materials Science & Engineering. B, Solid-State Materials For Advanced Technology
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Atomic Force Microscope
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Atomic Force Microscopy
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Dopant Profiling
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Kelvin
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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