Search Results - Hockele, U.

  • Showing 1 - 1 results of 1
Refine Results
  1. 1
    Regression methods for prediction of PECVD Silicon Nitride layer thickness

    Regression methods for prediction of PECVD Silicon Nitride layer thickness by Purwins, H., Nagi, A., Barak, B., Hockele, U., Kyek, A., Lenz, B., Pfeifer, G., Weinzierl, K.

    Request full text
    Items that cite this one
    Conference Proceeding
    Save to List
    Saved in:

Search Tools: