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The effect of HF processing on gate oxide degradation in aggressive poly buffered LOCOS isolation
by
Cox, K.
,
Chonko, M.
,
Honcik, C.
,
VanDyke, S.
Published in
IEEE electron device letters
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Characterization and elimination of trench dislocations
by
Damiano, J.
,
Subramanian, C.K.
,
Gibson, M.
,
Feng, Y.-S.
,
Zeng, L.
,
Sebek, J.
,
Deeters, E.
,
Feng, C.
,
McNelly, T.
,
Blackwell, M.
,
Nguyen, H.
,
Tian, H.
,
Scott, J.
,
Zaman, J.
,
Honcik, C.
,
Miscione, M.
,
Cox, K.
,
Hayden, J.
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