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    Fabrication of Silicon Nanopillar Teradot Arrays by Electron‐Beam Patterning for Nanoimprint Molds

    Fabrication of Silicon Nanopillar Teradot Arrays by Electron‐Beam Patterning for Nanoimprint Molds by Wi, Jung‐Sub, Lee, Hyo‐Sung, Lim, Kipil, Nam, Sung‐Wook, Kim, Hyun‐Mi, Park, Soo‐Yeon, Lee, Jae Jong, Hong, Chris Daehoon, Jin, Sungho, Kim, Ki‐Bum

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