Search Results - Hong, Sangjeen

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    Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis

    Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis by Han, Chansu, Koo, Yoonsung, Kim, Jaehwan, Choi, Kwangwook, Hong, Sangjeen

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    Dual-Frequency RF Impedance Matching Circuits for Semiconductor Plasma Etch Equipment

    Dual-Frequency RF Impedance Matching Circuits for Semiconductor Plasma Etch Equipment by Lee, Jeongsu, Hong, Sangjeen

    Published in Electronics (Basel)
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