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AUSN solder vacuum packaging using melted solder floodgates and laser-activated non-evaporable getters for SIC diaphragm anticorrosive vacuum sensors
by
Tanaka, Shuji
,
Honjoya, Yutaka
,
Esashi, Masayoshi
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Conference Proceeding
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Conference Proceedings
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Chemical Lasers
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Chemical Technology
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Engineering
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Engineering, Electrical & Electronic
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Gettering
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Nanoscience & Nanotechnology
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Packaging
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Rough Surfaces
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Science & Technology
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Science & Technology - Other Topics
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Silicon Carbide
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Surface Contamination
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Surface Roughness
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Technology
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Vacuum Technology
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Wafer Scale Integration
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Ieee Electronic Library (Iel) Conference Proceedings
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