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Search Results - Hsieh, Brian Yueh-Ling
Search Results - Hsieh, Brian Yueh-Ling
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Electron Beam Inspection in Physical Mode: Overpolish Monitoring of RMG CMP
by
Hafer, Richard F
,
Lin, Hong
,
Stamper, Andrew
,
Hsieh, Brian Yueh-Ling
,
Hsieh, Jerry
Published in
IEEE transactions on semiconductor manufacturing
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Electron Beam Inspection: Within Die and Within- Wafer monitoring of RMG CMP
by
Hafer, Richard F.
,
Lin, Hong
,
Hsieh, Brian Yueh-Ling
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Electron beam inspection: CDU dual-mode inspection and lithography ghost image detection
by
Hafer, Richard F.
,
Patterson, Oliver D.
,
McKindles, Derek
,
Hsieh, Brian Yueh-Ling
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In-line characterization of EDRAM for a FINFET technology using VC inspection
by
Patterson, Oliver D.
,
Hafer, Richard
,
Mittal, Surbhi
,
Arya, Ankur
,
Stein, Kenneth
,
Ho, Herbert
,
Davies, William
,
Tang, Xiaohu
,
Hsieh, Brian Yueh-Ling
,
Lei, Shuen-Cheng Chris
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Solved: the mystery of bright voltage contrast word-line defects for SOI technology using nanoprobing
by
Patterson, Oliver D.
,
Hafer, Richard F.
,
Pendyala, Sweta
,
Song, Zhigang
,
Hsieh, Brian Yueh-Ling
,
Tang, Xiaohu
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