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Enhanced life ion source for germanium and carbon ion implantation
by
Hsieh, Tseh-Jen
,
Colvin, Neil
,
Kondratenko, Serguei
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Carbon
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Carbon Dioxide
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Carbon Ions
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Cathodes
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Deposition
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Doping Impurity Implantation In Germanium And Carbon
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Engineering
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Engineering, Electrical & Electronic
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Germanium
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Germanium Fluorides
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Germanium Ions
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Ion Beams
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Ion Implantation
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Ion Sources
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Lifetime
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Materials Science
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Optimization
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Oxidation
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Particle Accelerators
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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